From:  Smart nanofluidic systems powered by DNA origami for targeted intracellular delivery: a newer approach

 Fabrication techniques and surface functionalization methods for nanofluidic—DNA origami integration.

Fabrication techniqueResolution (nm)Substrate compatibilityKey functionalization strategy
Electron-beam lithography (EBL)10–20Silicon, silicon nitride, glassCovalent silanization (e.g., APTES), Au-thiol linkers
Focused ion beam (FIB) milling20–50Silicon, glassStreptavidin-biotin bridges; SAMs on gold-coated surfaces
Nanoimprint lithography (NIL)~20–100PDMS, thermoplasticsUV-curable adhesives; layer-by-layer electrostatic assembly
Photolithography + etching~100–500Glass, quartz, PMMAEDC/NHS-mediated amine-carboxyl coupling
Soft lithography (PDMS-based)~100–1,000PDMS, glassMicrocontact printing with DNA-modified stamps
3D nanoprinting (two-photon)~200Polymer resinsDirect embedding of DNA origami with photopolymerizable anchors

3D: three-dimensional.